Waferprober

General information

  • High-precision electrical contacting of samples with planar surfaces
  • Possibility of temperature-dependent investigations

Technical data

  • 200 mm main chuck, 240 mm x 315 mm positioning area
  • 2 aux chucks
  • Thermo chuck 25 mm x 25 mm, 25 °C – 150 °C

  • 2 micropositioners with 13 mm positioning range and sub-micrometer positioning accuracy

     

Required consumables / if necessary to purchase measurement-specific

  • Measuring tips (probes)