Omicron NanoSAM

(Kopie 3)

The NanoSAM by the company Omicron is a combination of a scanning electron microscope and an auger mnicroprobe (Scanning Auger Microscope, SAM), which uses the auger effect for element analysis. Under good conditions, the NanoSAM offers a lateral resolution under 5 nm, and lateral-chemical under 10 nm. The device is also equipped with an ion-etching device that uses Ar+ sputtering, meaning that both chemical and topographical depth profiles can be produced. Conductive, and in many cases also non-conductive samples can be used. A breaking device in the vacuum system enables the study of the cleanest breaks, as the fractured surfaces are sluiced in the system's analysis chamber immediately after the break and can be examined.


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