FEI Helios Nanolab 600

(Kopie 3)

The Helios Nanolab 600 operated by the company FEI has a field emission cathode (FE-TEM), a focussed gallium ion beam (Focused Ion Beam, FIB) and a large number of detectors. The topography or the material composition of sample surfaces can be mapped using secondary electrons or backscattered electrons. The analysis of the emitted X-rays enables a quantitative or spatially resolved determination of the element composition (see EDX).  Using solid samples, diffraction images can be recorded in backscatter arrangement, which provides information on the crystal structure and chemical phases (Electron Backscattered Diffraction, EBSD).
Thin samples (100 nm) enable studies by means of transmitted electrons (Scanning Transmission Electron Microscopy, STEM). The gallium ion beam can be used for mapping, for material removal and for the depositing of platinum. This system enables cross-sectional examinations in solid samples, the preparation of samples for transmission electron microscopy and the bonding of structures by means of platinum deposition.


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