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Scanning Transmission Electron Microscopy (STEM)

(Kopie 2)

Schematic representation of STEM.

Scanning Transmission Electron Microscopy (STEM) refers to measurement and mapping by means of electrons transmitted through the sample. The detection of these electrons takes place in a scanning electron microscope (SEM) with a detector underneath the sample. The procedure enables the mapping of the internal structure of samples with thicknesses of up to 100 nm.
The low material thickness of the samples also results in a higher spatial resolution in case of energy-dispersive X-ray spectroscopy (EDX). During STEM studies in a standard SEM, a lower acceleration voltage within the range from 15 kV to 50 kV is used than is the case with conventional transmission electron microscopy (TEM).

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